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TESCOM 12 Series is a miniature ultra high purity IGS/VCR pressure reducing regulator. The 12 Series offers 5 Ra or 10 Ra microinch finishes, tied diaphragm and internally springless and threadless design. It provides inlet pressures of 150 psig / 10.3 bar, outlet pressure from 250 mm Hg-15, 30, 60, 100 psig / 250 mm Hg-1.0, 2.1, 4.1, 6.9 bar with flow rates up to 120 SLPM.
Applications
  • OEM Tools 
  • Gas Boxes 
  • Low-Pressure Gas Cabinets 
Features and Benefits
  • Product of choice for state-of-the-art OEM gas systems 
  • Ultra-sensitive pressure control enhances MFC performance 
  • Superior performance in a wide range of applications 
  • Flows from 2 SCFM to 120 SLPM 
  • Unsurpassed droop and repeatability in a micro component 
  • Metal-to-metal diaphragm to body seal for high leak integrity 
  • 10 Ra or 5 Ra microinch internal surface finish 
  • Meets SEMI F19 and SEMI Modular Interface specifications